A MEMS Fiber-Optic Fabry-Perot Vibration Sensor for High-Temperature Applications
نویسندگان
چکیده
An extrinsic high-temperature fiber-optic Fabry-Perot vibration sensor based on MEMS technology is described and experimentally demonstrated. The sensitive unit consists of four cross beams with a central seismic mass batch-fabricated silicon wafer. sensing head fabricated by including dry etching, anodic bonding dicing processing. And the optical fiber intergrated in laser fusing. According to our calculation, has resonance frequency 10.008kHz. Experimental results indicated that sensitivity from 2g 22g, 200Hz, was 2.48 nm/g at 20° can work stably 400°. nonlinearity evaluated 400° max nonlinear error 1.88% 300°. In addition, temperature drift crossed agreed well theoretical analysis. We believe this proposed wide engineering application prospect.
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ژورنال
عنوان ژورنال: IEEE Access
سال: 2022
ISSN: ['2169-3536']
DOI: https://doi.org/10.1109/access.2022.3168350